Detecting sticky dust particles on workpieces in clean rooms
Under ordinary lighting in a clean room, it is often difficult to distinguish particles from background; only when a specific wavelength +a low-angle collimated light source can the sticky particles be clearly visible.
Application
- Wafer sticky dust particles inspection.
- Wafer mask defect inspection (ex. Mask Package RSP200).
- Transparent materials such as glass, or scratches on metal surfaces.
- Mechanical parts / Component appearance Inspection (Flaws, Defects).
- UPS <790> <1790> Visual Inspection
- The background color is white, and the workpiece surface is difficult to detect
(can be detected by the advanced ITL Mk2).
Simplified version
- Ability to detect dust : Basic.
- Equipped with a fan to improve heat dissipation, suitable for long-term use such as quality inspection.
- Dual light source channels can be switched.
- White/green light is standard, blue/amber light is optional.
- Adjustable lighting angle. The brightness can be adjusted freely (dimming range: 0% ~ 100%).
- large area light source. The lighting range (breadth) is better than the general dust detection light.
- Cameras can be connected for observation or measurement.
- Supports switching light sources via pedals or connected systems.
Basic version ( ITL Mk1)
- Ability to detect dust : Moderate.
- Fanless. Passive heat dissipation design and enhanced heat dissipation module can achieve excellent heat dissipation without the need for fans. It is most suitable for industries with extremely high requirements for dust detection and stable air flow in clean rooms, such as semiconductors, biotechnology, precision instrument manufacturing, pharmaceuticals, etc.
- Dual light source channels can be switched.
- White/green light is standard, blue/amber light is optional.
- Adjustable lighting angle. The brightness can be adjusted freely (dimming range: 0% ~ 100%).
- large area light source. The lighting range (breadth) is better than the general dust detection light.
- Cameras can be connected for observation or measurement.
- Supports switching light sources via pedals or connected systems.
Advanced version (ITL Mk2)
- Compared with the basic version, the advanced version optimizes optical performance and light source design, not only improving collimation but also improving dust particle measurement by an order of magnitude.
- Fanless. Passive heat dissipation design and enhanced heat dissipation module can achieve excellent heat dissipation without the need for fans. It is most suitable for industries with extremely high requirements for dust detection and stable air flow in clean rooms, such as semiconductors, biotechnology, precision instrument manufacturing, pharmaceuticals, etc.
- Single light source channel.
- Green light is standard, white/blue/amber light are also available.
- Adjustable lighting angle. The brightness can be adjusted freely (dimming range: 0% ~ 100%).
- large area light source. The lighting range (breadth) is better than the general dust detection light.
- Cameras can be connected for observation or measurement.
- Supports switching light sources via pedals or connected systems.
Note: The sample wafer has 300+ dust particles visible under Mk1 and 3000+ dust particles under Mk2.
(comparison image)
The Platform-type (all versions) light box can be independently paired with a cantilever bracket luminaire; ideal for large areas requiring consistent, even lighting.
Help to illuminate and display dust particles on wafers in clean rooms
Understanding and responding to customer needs: From MK1 to MK2, we have continuously improved to meet the specific needs of the semiconductor industry, pharmaceutical plants and fine printing companies, as well as other customers who use clean rooms.
White substrate for ceramic circuit board. Defects and dust particles on the inspected surface with a white background are usually difficult to be detected. However, the difference can be clearly seen from certain angles of advanced model MK2. Suitable for industries in clean rooms that have strict requirements on the size and quantity of dust in the air.
Compared with the current Japanese brand inspection lamp which only has a collimated detection light source with an area slightly larger than a 50-yuan coin, our MK2 can still provide a large-area light field with uniform collimation even on a workpiece of 20x20cm size (figure 3).
MK2 Detection effect images set
MK1 Detection effect images set
ITL Platform Type - Basic version Mk1 vs. Advanced version Mk2: Dust Detection Comparison image
Benefits
- Adjustability. Multi-angle adjustable light sources avoid reflection.
- Conform to the workspace, choose the platform type or bracket type.
- Use a foot switch to control and switch the light sources, user can concentrate on product inspection.
- A wide range of optional multi-wavelength light sources is offered, suitable for a variety of industries, for example welding, that need to be visually inspected as a quality control.
- Stainless steel, durable and hygienic, suitable for clean room.
- provides rich, evenly diffused light across the work surface.
- Offer customized 2-Wavelength High-Power LED Sources.
- Make the field inspections become quick and simple.
- visual inspection lighting is to assist the detect for a variety of surface flaws, including cracks.